流导可控的AAO分子流漏孔的制作与动态测试

Fabrication and Dynamic Testing of Standard-Leak Based on Anodic Al-Oxide Membrane:A Theoretical and Experimental Study

随着分子流漏孔的广泛应用,迫切需要一种制作简单、成本低廉且流导可控的分子流漏孔制作方法。本文基于阳极多孔氧化铝(AAO)模板,利用打孔硅片作为掩膜和支撑材料,制作出不同有效面积的AAO新型分子流漏孔,然后使用自主设计的动态差压法漏孔测量设备,以氮气、氮气和氮气作为测试气体对所制作的直径分别为2和13nun圆形AAO分子流漏孔流导进行了测量。实验结果表明,漏孔的流导测量值接近理论计算值,流经AAO漏孔的气体始终保持分子流状态,即流导维持不变。AA0分子流漏孔具有制备工艺简单、成本低、流导可控且可预测不同种类气体流导等优点。

A novel type of standard-leak with controllable molecular flow conductance was developed, compri-sing a circular anodic aluminum oxide ( AAO) membrane sandwiched and glued between the two holes of circular supporting silicon and oxygen-free copper discs. The conductance of the standard-leak can be well-controlled by ad-justing the effective area of AAO membrane. The conductance, through the newly-developed standard-leaks with AAO effective diameters of 2 and 13 mm, was theoretically analyzed and experimentally evaluated with the lab-built test platform. The results show that the AAO-based standard-leak is capable of providing a constant molecular flow conductance of nitrogen/helium/argon. The measured and calculated results were found to be in good agreement. We suggest that the low coat, easy fabricated AAO-based standard-leak may be of some technological interest in leak detection and leakage rate calibration.