浅述多晶硅生产用沉积载体

Discussion on the Deposition Carrier for Polysilicon Production

基于沉积载体硅芯的形态,介绍了圆硅芯、方硅芯和中空硅芯等3种加工方式,并从原料成本、设备折旧、能源消耗、人力成本、制造费用等关键生产要素方面对硅芯的生产成本进行估算,同时分析了硅芯的应用情况,并总结了多年来多晶硅生产实际应用的经验。

Based on the morphology of silicon core as deposition carrier, three kinds of processing methods, such as round silicon core, square silicon core and hollow silicon core, were introduced. The production cost of silicon core was estimated from the key production factors of raw material cost, equipment depreciation, energy consumption, manpower cost and manufacturing expense, and the application of silicon core was analyzed, and the practical experience of polysilicon production over the years was summarized.