摘要
通过非平衡磁控溅射技术,改变沉积工艺参数,在不锈钢及单晶硅基体上制备未掺杂、钨(W)掺杂以及钒(V)掺杂类金刚石(DLC)薄膜。采用拉曼光谱,纳米压痕法对薄膜结构和力学性能进行表征。在室温、250℃、500℃进行磨损实验,研究其不同温度范围的摩擦磨损性能。研究结果表明:适量掺杂W元素,可显著地提高W-DLC膜力学与摩擦性能,在W靶电流为0.6A条件下,W-DLC膜具有最优的综合性能,纳米硬度和弹性模量分别为11.11GPa和169.25GPa,其中在250℃条件下摩擦系数低至0.044,室温磨损率为1.27×10-7 mm^3/Nm,但W-DLC薄膜难以适应高温;适量掺杂V元素,可以显著提高V-DLC膜的纳米硬度和弹性模量,并能改善高温摩擦性能,在V靶功率为1.2kW条件下,V-DLC薄膜的纳米硬度和弹性模量分别为37.36GPa和379.89GPa,其中在500℃高温摩擦条件下,V-DLC薄膜的摩擦系数最低为0.35。
Undoped,tungsten(W)doped and vanadium(V)doped diamond-like carbon(DLC)films were prepared on stainless steel and monocrystalline silicon substrates by unbalanced magnetron sputtering with varying deposition parameters.The structure and mechanical properties of films were characterized by raman spectroscopy and nanoindentation.Wear experiments were carried out at room temperature,250℃and 500℃to study the friction and wear properties of alloy in different temperature ranges.The results showed that the mechanical and friction properties of W-DLC film can be significantly improved by doping W element.W-DLC films had the best comprehensive properties at 0.6 Atarget current.The nano-hardness and elastic modulus of W-DLC films were 11.11 GPa and 169.25 GPa,respectively.The friction coefficient was as low as 0.044 at 250℃and the room temperature wear rate was 1.27×10^-7 mm^3/Nm,but W-DLC film was difficult to adapt to high temperature.The nano-hardness and modulus of elasticity of V-DLC film can be improved significantly by doping V element.The nano-hardness and modulus of elasticity of V-DLC film were 37.36 GPa and 379.89 GPa respectively at 1.2 kW of V target power.The friction coefficient of V-DLC film was the lowest to 0.35 at 500℃.
作者
何帅
孙德恩
曾宪光
王建川
He Shuai;Sun Deen;Zeng Xianguang;Wang Jianchuan(School of Materials Science and Engineering,Chongqing University,Chongqing 400020;Sichuan University of Science and Engineering,Material Corrosion and Protection Key Laboratory of Sichuan Province,Zigong 643000;School of Chemistry and Chemical Engineering,Chongqing University,Chongqing 400044;Key Laboratory of Fuel Cell Technology of Hubei Province,Wuhan University of Technology,Wuhan 430070)
出处
《化工新型材料》
CAS
CSCD
北大核心
2019年第4期162-166,共5页
New Chemical Materials
基金
国家自然科学基金(51671153
51771037)
材料腐蚀与防护四川省重点实验室开放基金资助(2016CL13)
关键词
钨、钒掺杂
DLC薄膜
温度适应
摩擦磨损
tungsten and vanadium doping
DLC film
temperature adaptation
friction and wear