纳秒激光熔覆硅纳米薄膜的仿真分析及实验研究

Simulation Analysis and Experimental Study on Nanosecond Laser Cladding Silicon Nano Film

以重掺杂硼的纳米硅浆料为硼源,采用纳秒激光熔覆工艺,在钝化发射极及背接触(PERC)电池背面形成了重掺杂硼的硅熔覆层。通过建立三维瞬态温度场的有限元仿真模型,并利用单因素仿真实验,得到了激光工艺参数对温度场的影响规律,初步确定了各激光工艺参数的合理范围。利用极差分析获得了激光工艺参数与激光熔覆温度场分布的相互作用规律。将激光熔覆工艺兼容到PERC电池的制备实验中,结果表明:仿真模型与实验结果较为吻合,电池的平均光电转化效率提升了0.27%。

Nano-silicon slurry with heavily doped boron is used as the source of boron,and nanosecond laser cladding process is used to form a heavily doped boron silicon cladding layer on the back of passivated emitter rear contact(PERC) solar cells.The finite element simulation model of three-dimensional transient temperature field is established.Based on this model and single factor simulation experiments,the influence rules of laser process parameters on temperature field are obtained and reasonable range of laser process parameters is preliminarily determined.Through range analysis,the interaction law between laser processing parameters and temperature field distribution of laser cladding is obtained.Laser cladding process is compatible with PERC solar cells preparation experiment.The experimental results show that the simulation model is consistent with the experimental results,and the average photoelectric conversion efficiency of the solar cell is improved by 0.27%.