氧化锌纳米棒紫外探测器的制备及性能

Fabrication and performance of Zinc Oxide nanorods based photoconductive ultraviolet detectors

应用磁控溅射技术、光刻技术和水热法在玻璃衬底上制备了氧化锌(ZnO)光电导型紫外探测器。利用扫描电子显微镜、X射线衍射仪和分光光度计等测试仪器对ZnO光电导型紫外探测器进行表征分析。实验结果表明,ZnO薄膜紫外探测器和ZnO纳米棒紫外探测器光电流分别为5.78mA和6.48mA;相比ZnO薄膜光电导型紫外探测器,ZnO纳米棒光电导型紫外探测器响应度提高了12.9%、灵敏度提高了14.5%,响应时间缩短了66.7%。

ZnO photoconductive ultraviolet (UV) detectors are developed on glass substrates by magnetron sputtering, lithography and hydrothermal methods. The ZnO photoconductive UV detectors are characterized by scanning electron microscope, X-ray diffraction and UV-visible spectrophotometer. The experimental results show that the photocurrents of the ZnO thin film ultraviolet detector and the ZnO nanorod ultraviolet detector are 5.78 mA and 6.48 mA respectively . Compared with the ZnO thin film photoconductive ultraviolet detector, the ZnO nanorod photoconductive UV detector has improved response by 12.9%, sensitivity by 14.5%, and response time has reduced by 66.7%.