摘要
提出了一种基于WS_2纳米片的聚酰亚胺柔性湿度传感器,传感器柔性薄膜和叉指电容电极分别采用加热亚胺化工艺和丝网印刷制备得到,其制备工艺简单,成本低廉。实验表明该柔性湿度传感器能够测量25%RH～85%RH的湿度,且在高湿度范围内(60%RH～85%RH),该柔性湿度传感器的灵敏度高达50.42 pF/%RH。传感器的响应和恢复时间分别为11和26 s,具有较好的稳定性和重复性。此外,该柔性传感器的呼吸性能测试结果表明,其能够用于监测时间间隔为2～10 s的呼吸状态,暗示该传感器可用于某些和呼吸频率有关的疾病诊断。
A polyimide flexible humidity sensor based on WS2 nanoflakes was proposed.The flexible film and interdigital capacitance electrodes of the humidity sensor were fabricated by the thermal imidization process and screen printing process,respectively.The fabrication processes were simple and low in cost.The experiment results show that the flexible humidity sensor can be used for the humidity detection in 25%RH-85%RH,and the sensor indicates the sensitivity up to 50.42 pF/%RH in the high humidity range of 60%RH-85%RH.The response time and recovery time of the sensor are 11 and 26 s,respectively,indicating good stability and repeatability.Furthermore,the respiration monitoring results of the flexible humidity sensor show that the sensor can detect the human breath in the interval of 2-10 s,indicating that the sensor can be used for the diagnosis gauge of some respiration-related diseases.
作者
吕文
谭秋林
Lii Wen;Tan Qiulin(Key Laboratory of Instrumentation Science & Dynamic Measurement of the Ministry of Education ,North University of China , Taiyuan 030051 , China})
出处
《微纳电子技术》
北大核心
2019年第6期450-454,485,共6页
Micronanoelectronic Technology
基金
国家自然科学基金资助项目(61471324
51425505)
关键词
传感器
柔性基底
WS2纳米片
湿度监控
呼吸监控
sensor
flexible substrate
WS2 nanoflake
humidity monitoring
respiration monitoring
