纳米Al_2O_3电泳沉积成膜的影响因素研究

Study on Influencing Factors of Nano-Al_2O_3 Electrophoretic Deposition Films

为研究电泳沉积薄膜沉积量分布特征及影响因素,对纳米Al_2O_3材料进行电泳沉积薄膜试验和仿真研究。试验过程中,对纳米Al_2O_3薄膜沉积的微观形貌、成分及沉积量与电压、沉积时间关系进行了研究;在仿真研究过程中,利用电场、流场、沉积场多场耦合技术研究分析了电场分布、流场特性、沉积时间等对电泳沉积纳米Al_2O_3薄膜的影响。结果表明:电场在阴极正、反两侧强弱分布使得正面沉积量明显大于反面,同时流场的涡流分布特征加速了粒子在阴极边缘沉积。仿真结果与试验结果吻合度较好,验证了仿真模型的有效性,为进一步研究电泳沉积流体流动特性和沉积过程提供了一种新的研究方法和手段。

In order to study the distribution characteristics and influencing factors of deposition mass for electrophoretic deposition films,the nano-Al2O3 films were prepared by electrophoretic deposition,which were analyzed by simulations. In the experimental study,the microstructure and composition of nano-Al2O3 films were detected and the relationship between deposition mass and deposition voltage or deposition time was studied. In the process of simulation research,the multi-field technologies coupled with electric field,flow field and deposition field were employed for analyzing the effects of electric field distribution,flow field characteristics,deposition time and others on nano-Al2O3 films prepared by electrophoretic deposition. Results showed that the mass of pros side deposition was obviously more than that of corns side deposition due to electric field distribution which was strong at pros side of the cathode but weak at corns one. At the same time,the eddy distribution characteristics of flow field accelerated the deposition of particles on the cathode edge. The simulation results were in good agreement with experiment results,which verified the validity of simulation model and provided a new research method and means for further studying the flow characteristics and deposition process of electrophoretic deposition.