摘要
MgB_2超导材料由于其优异的超导性能和电学参数,是制作超导集成电路的理想材料之一。制备基于MgB_2超导薄膜的高质量约瑟夫森结是超导电子学应用的关键。以聚酰亚胺(PI)为抗蚀层,在MgB_2超导薄膜上实现微米量级的图形线条制作,以此工艺为基础,结合MgB_2超导薄膜的气相化学沉积和晶型B介质层沉积方法,制作了基于MgB_2超导材料的约瑟夫森纵向结阵列,并测试了相应结的约瑟夫森效应。
MgB2 material is an ideal candidate for its outstanding superconducting property and electrical parameter. The preparation of high quality Josephson junction is the key problem in the application of superconducting electronics. In this paper polymide was used as the resistant layer, the pattern transfer was realized on MgB2 superconductive film by the micron dimension. By combining the MgB2 superconductive film CVD method and crystallized B dielectric layer deposition technology, the praparation of MgB2 superconductive Josephson junction arrays was achieved.
作者
王松
梁蓓
余军
张勇
马奎
杨健
梁超
王代强
Wang Song;Liang Bei;Yu Jun;Zhang Yong;Ma Kui;Yang Jian;Liang Chao;Wang Daiqiang(College of Science and Technology, Guizhou University, Guiyang 550025 , China;College of Big Data and Information Engineering, Guizhou University, Guiyang 550025 ,China;College of Material Science and Engineering, Guizhou Minzu University, Guiyang 550025 ,China)
出处
《低温与超导》
CAS
北大核心
2019年第4期29-33,共5页
Cryogenics and Superconductivity
基金
国家自然科学基金(11564005)
贵州大学引进人才科研项目(2018-61)
关键词
PI薄膜
MGB2
约瑟夫森结
超导集成电路
PI film
MgB2
Josephson junction
Superconducting integration circuits
