1064 nm MOPA激光器非晶硅薄膜太阳能电池清边工艺研究

Edge Cleaning Processing of a-Si∶H Thin Film Solar Cell with 1 064 nm MOPA Laser

利用1064nm MOPA光纤激光器对非晶硅薄膜太阳能电池制备工序中的激光清边工序进行了实验研究,探讨了激光器脉冲宽度、填充线间距、扫描速度等工艺参数对加工效果的影响。在脉冲宽度100ns,重复频率80kHz.填充线间距35μm,输出功率比100%,扫描速度3500mm/s,光斑交叠比wx=0.83,wy=0.88的参数下,获得了清边区表面理想,电阻值>1000MΩ的良好清边效果。

The laser edge cleaning process in lhe preparation process of a-Si∶H thin film solar cell was experimentally studied by using a 1 064 nm MOPA fiber laser. The effects of process parameters such as laser pulse width, filling line spacing? scanning speed and others on the processing results were discussed. Under the parameters of pulse width 100 ns, repetition frequency 80 kHz, filling line spacing 35μm, output power ratio 100%, scanning speed 3 500 mm/s, spot overlap ratio wx=0.83, wy=0.88, a good edge cleaning effect was obtained on the surface of the clear-edged area with a resistance〉1 000 MΩ.