摘要
压电陶瓷驱动平台的迟滞非线性影响其定位精度,并降低原子力显微镜等微纳操纵系统对微纳米尺度样品的扫描成像质量。采用最小二乘法对压电陶瓷驱动平台的迟滞特性进行建模,避免了繁琐的迟滞模型求取过程;提出前馈控制与自抗扰控制相结合的复合控制方法,通过设定扩张观测器的带宽及系统控制带宽达到消除迟滞、提高平台定位精度的目的。实验结果表明,该复合控制方法在保证系统稳定性的前提下能有效地提高系统定位控制精度。
The hysteresis nonlinearity of piezoelectric ceramic driving platform affects its positioning accuracy,and reduces the quality of such micro-nano manipulation systems as atomic force microscopy for scan imaging of micro/nanoscale samples.The hysteresis characteristics of piezoelectric ceramic driving platform are modeled by the least squares method,thus the cumbersome hysteresis model acquisition process is avoided.The composite control method combining feed-forward control with active disturbance rejection control is proposed.By setting the bandwidths of the expansion observer and the system control,the purpose of eliminating hysteresis and improving the positioning accuracy of the platform is achieved.The experimental results show that the composite control method can effectively improve the system positioning control accuracy under the premise of ensuring system stability.
作者
赵庆旭
王一帆
吴文鹏
胡贞
ZHAO Qing-xu;WANG Yi-fan;WU Wen-peng;HU Zhen(Changchun University of Science and Technology,Changchun 130022,China)
出处
《电光与控制》
CSCD
北大核心
2019年第6期80-84,105,共6页
Electronics Optics & Control
基金
吉林省自然科学基金(201554)
关键词
压电陶瓷驱动平台
迟滞
定位精度
自抗扰控制
复合控制
piezoelectric ceramic driving platform
hysteresis
positioning accuracy
active disturbance rejection control
composite control
