电涡流传感器的稳定工作条件研究

Study Stable Working Conditions of Eddy Current Sensor

为了研究电涡流传感器测量系统的工作稳定性,提出了采用试验设计和响应曲面方法分析电涡流传感器的稳定工作条件。通过对电涡流传感器测量系统影响因子的研究,分析显著影响因子的工作特性,建立工作模型,研究电涡流传感器对微小位移的检测能力。研究表明,在电涡流传感器测量系统中,激励源和测试距离是显著影响因子,当激励源频率在(15Hz,27.5Hz)之间,激励源电压幅度在(4V,28V)之间,电涡流传感器在(2mm,10mm)之间的测试距离内检测微小位移,线性度最好,性能可靠,这对于改善实验设备的质量水平提供了科学的实验分析,具有重要的实用价值。

In order to study the stability of eddy current sensor measurement system, the working conditions of eddy current sensor measurement system is explored by the Design of Experiments and the Response Surface Methodology. The characteristics of significant factors are analyzed, the working model is set up, and the testing ability of eddy current sensor on the micro distance is studied. It demonstrates that the driving source and the distance are the significant factors. When the driving frequency is between 15Hz to 27.5Hz, the driving voltage is between 4V to 28V, the Eddy Current Sensor achieves the testing distance of 2mm to 10mm with the best linearity and reliability of the eddy current sensor measurement system, which demonstrate the important practical value to improve the quality of the experimental instruments by scientific analysis.