无线射频识别技术在CMP设备中的应用

Application of Radio Frequency Identification Technology in Chemical Mechanical Polishing Equipment

介绍了无线射频识别技术的主要原理及其特点,通过对化学机械抛光(CMP)设备中片盒(Cassette)识别模块的分析,将无线射频识别技术(RFID)应用到化学机械抛光设备中,对Cassette上射频标签进行数据读写操作。射频标签中含有晶圆加工工艺信息,可用于成品质量追踪、回馈,便于晶圆管理,并为工厂自动化管理晶圆调度系统提供数据。

This paper introduces the main principles and characteristics of radio frequency identification technology.By analyzing the cassette identification module in Chemical Mechanical Polishing (CMP) equipment,the Radio Frequency Identification(RFID) technology is applied to CMP equipment,The tag performs data read and write operations.The tag contains wafer manufacturing process information that can be used for product quality tracking and feedback,facilitates wafer management,and provides data for FAB automation management wafer scheduling systems.