摘要
运用Solidworks Simulation软件对一款加热吸附平台表面受热发生翘曲变形问题进行了分析,找到了加热吸附平台表面发生翘曲变形的原因,根据分析结果对该加热吸附平台的结构进行了改进,解决了加热吸附平台表面受热发生翘曲变形的问题。
The thermal deformation of a heating absorption worktable is analyzed by solidworks simulation software in this paper,and the reason of surface thermal deformation of the heating absorption worktable is found.The structure of the heating absorption worktable is improved according to the results of analysis,at last the problem of surface thermal deformation of the heating absorption worktable is solved.
作者
郎平
王军帅
高泽
刘子阳
刘文平
LANG Ping;WANG Junshuai;GAO Ze;LIU Ziyang;LIU Wenping(CETC Beijing Electronic Equipment CO.,Ltd,Beijing 100176,China)
出处
《电子工业专用设备》
2019年第3期46-49,共4页
Equipment for Electronic Products Manufacturing
关键词
有限元分析
加热吸附平台
热变形
Finite element analysis(FEA)
Heating absorption worktable
Thermal deformation