全自动涂胶设备及涂胶工艺的研究

Research of Equipment and Coating Process by Automatic Spin-Coater

涂胶作为光刻工艺的重要环节,为了保证涂胶工艺质量,提高涂胶设备的自动化程度,减少中间污染环节,开发了一种全自动涂胶设备,通过对涂胶腔体和机械手等关键部件的改进,更好地满足了用户生产线要求;并通过对涂胶工艺中影响膜厚均匀性的重要因素进行研究、实验和分析,得出了适合用户生产线的工艺配方。

Spin-Coater is an important part of the photolithography process.In order to ensure the quality of coating process,improve the automation of coating equipment and reduce the contamination of the link,a kind of automatic coating equipment has been developed,and the key parts were improved to meet the requirements of user production line better,such as coating cavity and robotic arm,etc.By researching the coating process and the important factors affecting the uniformity of the thickness,a recipe is got to be suitable for user production line.