自动控径单晶炉控温方式的研究

Study on Temperature Control Mode of Automatic Diameter Control Single Crystal Furnace

中频感应加热单晶炉生长晶体一般采用铱-铱铑热电偶测温,通过3504过程控制器控制电源输出功率实现自动控温,但生产实践中往往出现热偶测温点松动、断裂以及冷点漂移等诸多问题使炉温波动而严重影响生产的进行,本文介绍了采用中频电源功率模拟量控制的方法,能够避免上述情况的发生,有效的提高了晶体的生长质量和效率。

Medium-frequency induction heating single crystal furnace growth crystal is generally measured by iridiumiridium rhodium thermocouple.The output power of power supply is controlled by 3504 process controller to realize automatic temperature control.However,many problems such as loosening of temperature measuring point,fracture and drift of cold point often occur in production practice,which seriously affect the production.This paper introduces the power analogue control of medium frequency power supply.The method can avoid the above situation and effectively improve the quality and efficiency of crystal growth.