金刚石MEMS三维谐振器的设计与加工

Fabrication of Micro-Resonator with Diamond Coating in Micro-Electro Mechanical System Technology

微谐振器和陀螺仪因微机电系统(MEMS)水平的不断提升而被广泛关注和学习。采用MEMS设计和制造的微型传感器,因成本低、微尺寸和低耗能等特征而被广泛应用工程领域,在导航、消费电子等航空航天及相关高尖端领域具有广阔的发展前景。谐振器是组成陀螺仪重要组成部分,其相关性能的优良将会直接影响陀螺仪的操作精度。本文主要依据金刚石对MEMS三维谐振器的设计与加工,使所设计的三维谐振器具有良好的操作精度。

The micro-sensor,a key component of gyroscope and comprising the hemisphere and hemi-circular ring coated with ~2μm thick diamond coatings,was fabricated in conventional micro-electro mechanical system(MEMS) technology,including but not limited to the fabrication of concave Si-molds in hemi-sphere/hemi-circular ring shapes,thin film deposition,lithography,deep reactive ion etching,wet-etching,chemical-mechanical polishing.The influence of the conditions in each MEMS steps was investigated with scanning electron microscopy,Raman spectroscopy and in Matlab simulation to optimize the fabrication conditions.The preliminary results show that the six variables,including the Si-substrate orientation,concentration ratio of HF:HNO3:CH3COOH,mask-opening diameter,churning speed,etching temperature/time all have a major impact.Well-defined high quality hemispheres and hemi-circular rings of the resonator were fabricated under the optimized conditions.