LiNbO3单晶薄膜体声波谐振器的研制

Development of LiNbO3 Single Crystal Thin Film Bulk Acoustic Resonator

该文介绍了一种采用智能截割(Smart CutTM)技术制备的单晶铌酸锂(LiNbO3)薄膜体声波谐振器。采用COMSOL有限元仿真软件从材料和结构两方面对LiNbO3薄膜体声波谐振器进行优化设计,以实现高机电耦合系数,并通过Smart CutTM工艺方法制备了高性能Z切-LiNbO3单晶薄膜作为谐振器的压电层,最终得到LiNbO3薄膜体声波谐振器的谐振频率为3847.5MHz,反谐振频率为3986.25MHz,插入损耗为1.81dB,谐振器有效机电耦合系数达到8.3%。

The single crystal lithium niobate (LiNbO 3 ) thin film bulk acoustic resonator (FBAR) fabricated by Smart Cut TM technology is introduced in this paper. The COMSOL finite element simulation (FEM) software is used to optimize the material and structure of LiNbO 3 thin film FBAR in order to achieve high electromechanical coupling coefficient. A high-performance Z -cut LiNbO 3 thin film is fabricated as the piezoelectric layer of the resonator by Smart Cut TM technology. The resulting LiNbO 3 thin film bulk acoustic resonator has a resonant frequency of 3 847.5 MHz and an anti-resonant frequencies of 3 986.25 MHz, an insertion loss of 1.81 dB, and an effective electromechanical coupling coefficient of 8.3%.