多晶硅还原炉产能影响因素分析及提升措施

Analysis of Factors Affecting Productivity of Polysilicon Reduction Furnace and Improvement Measures

三氯氢硅还原是改良西门子法生产多晶硅的关键步骤,还原炉的产能能否达到设计甚至超出设计水平,对企业达产达标,降低成本,产品质量的稳定有很大影响。文章通过分析影响还原炉产能因素并提出了提升措施。

The reduction of trichlorosilane is a key step in the production of polysilicon by the modified Siemens method. Whether the production capacity of the reduction furnace can reach the design level or even exceed the design level has a great influence on the enterprise to reach the production standard,reduce the cost and stabilize the product quality.In this paper,the factors affecting productivity of polysilicon reduction furnace are analyzed and the improvement measures are put forward.