摘要
目前晶体生长装置通常采用PLC进行控制,但常规PLC的温度测量精度达不到要求的控制精度。采用PLC和高精度智能温度控制表结合,使生长槽温度精度达到±0.01℃。同时设计顺序降温控制,在规定的时间内,可进行阶段性的降温达到设定的温度。该系统已在实际生产中使用,满足了高品质晶体生长的要求。
Currently,PLC is adopted in the crystal growth device.The temperature measurement accuracy of conventional PLC can not meet the requirement of the control precision.If PLC is used with high precision intelligent temperature regulator,the measured temperature precision of the growth trough is up to±0.01℃.At the same time,the sequential temperature reduction control is also designed.In the specified time period,the temperature can be reduced to the set temperature.The system is used in actual production.It can meet the requirement of high quality crystal growth.
作者
沈正阳
潘丰
SHEN Zhengyang;PAN Feng(Key Laboratory of Advanced Process Control for Light Industry (Ministry of Education) ,Jiangnan University,Wuxi 214122,China)
出处
《机械制造与自动化》
2019年第3期220-222,228,共4页
Machine Building & Automation
关键词
晶体生长
温度控制
顺序控制
系统设计
crystal growth
temperature control
sequence control
system design
