电子级磷酸研发现状及芯片级磷酸展望

Research Progress on electronic-grade phosphoric acid and prospects of microchip-grade phosphoric acid

由于液晶显示器(LCD)工业和半导体芯片工业在中国迅速普及,用于清洗和蚀刻的电子级磷酸的需求正在日益增加,对磷酸中金属离子含量的要求也越来越高,为满足中国对电子级磷酸的需求,此方向成为许多研究学者研究的重点。本文介绍了近年来电子级磷酸的研发现状,以及在LCD工业和半导体芯片工业的应用,并对芯片级磷酸进行了展望。

With the rapid development of liquid crystal display(LCD) industry and semiconductor chipindustry in China, the demand for electronic-grade phosphoric acids is increasing day by day,and the purity requirement for phosphoric acid is also getting higher and higher. At present,it has become a hot-point of fine phosphorus chemical research. In this paper,the recent research progresses on electronic-grade phosphoric acid and their applications for LCD industry and semiconductor chip industry were introduced,and the prospects of microchip-grade phosphoric acid were discussed.