芯片原子钟MEMS原子气室数字温控系统设计

Design of the Digital Temperature Control System for the Chip Scale Atomic Clock MEMS Atomic Vapor Cell

芯片原子钟(CSAC)可以提供精准的时间基准,具有较好的应用前景。利用微型PIC~?单片机和增量式比例-微分-积分(PID)算法设计了一种CSAC微电子机械系统(MEMS)原子气室数字温控系统,并通过磁控溅射方法制作了MEMS原子气室专用的氧化铟锡(ITO)加热玻璃。温度是影响CSAC稳定度的一个重要因素,解决了CSAC系统气室温控的加热不均匀问题,温控精度达到了0.10℃,达到了CSAC温控精度优于0.15℃的要求。通过饱和吸收光谱实验,获得了明显的饱和吸收谱线。实验结果为高性能CSAC的研究提供了参考。

The chip scale atomic clock ( CSAC) provides accurate time reference and has good ap? plication prospects. A digital temperature control system for the CSAC micro-electromechanical system (MEMS) atomic vapor cell was designed by using micro peripheral interface controller (PIC?) microcontroller and increment proportion integral differential (PID) algorithm, and some dedicated ITO heating glasses for the MEMS atomic vapor cell were fabricated by the magnetron sputtering method. Temperature is one of the important factors that affect the stability of the CSAC. The system solves the problem of uneven heating of the CSAC vapor cell, and the temperature control accuracy reaches 0. 10℃, which meets the requirement that the temperature control accuracy of the CSAC is better than 0. 15℃. After saturated absorption spectroscopy experiments, a significant saturated absorption line was obtained. The experimental results provide a reference for the research of high performance CSAC.