温度对硅-蓝宝石压力传感器影响研究

Research on Thermal Influence to Silicon-on-Sapphire Pressure Sensor

针对硅-蓝宝石压力传感器在高温环境下测量精度较差的问题,以双层敏感膜片结构为基础,研究了温度对传感器的影响;通过对温度场及热应力的理论分析,证明了材料热膨胀系数不一致所产生的额外热应力,将引起测量误差;相应的ANSYS有限元仿真及实验也表明,温度效应对压力传感器的测试精度会产生较大的影响,且压力传感器的输出与温度值之间存在一定的规律。

In onter to solve the problem of poor measurement accuracy of silicon-sapphire pressure sensor in high temperature environment,the influence of temperature on the sensor is studies based on the double-layer sensitive diaphragm structure.The theoretical analysis of temperature field and thermal stress proves that the additional thermal stress caused by the inconsistent thermal expansion coefficient of different materials will cause measurement error.The corresponding ANSYS finite element simulation and experiment also show that the temperature effect has a great influence on the test accuracy of the pressure sensor,and there are certain rules between the temperature value and output of the pressure sensor.