摘要
针对石墨舟上下料机硅片传输的流程,分析产生碎片的部件、动作和原因,提出合理的改善方法,优化程序,并利用机器人和石墨舟检验吸盘和固定定位部件的安装精度,从而降低碎片率,提高设备运行的稳定性和良品率。
Through analyzing the transmission of wafer in tubular PECVD loading&unloading machine,where and why the motion leading to debris is found.Therefore,it puts forward a method to optimize procedure,improve the installation accuracy of suckers and locating assembly unit through graphite boat and robot,respectively.It turns out to be that these improvements have decreased debris rate,improved the yield,and the equipment could run more smoothly.
作者
张海
陈嘉荣
Zhang Hai;Chen Jiarong(The 2nd Research Institute of China Electronics Technology Group Corporation,Taiyuan Shanxi 030024,China)
出处
《山西电子技术》
2019年第3期36-38,共3页
Shanxi Electronic Technology
关键词
石墨舟上下料机
碎片率
定位
精度
tubular PECVD loading&unloading machine
debris rate
location
accuracy
