摘要
硅片良品率的高低与客户的经济效益息息相关,单晶PERC管式镀膜自动化设备中影响良品率的因素主要有吸盘印和划伤。本文主要分析了其产生的原因,并通过有效的改进措施使良品率大幅提升,为客户节约了成本。
The high and low yield of silicon wafer is closely related to the economic benefit of customers.The main factors affecting the yield of single crystal PERC tube coating automation equipment are sucker seal and scratch.This paper mainly analyzes the causes,and through effective improvement measures to improve the yield rate significantly and save the costs for customers.
作者
戎有兰
Rong Youlan(The 2nd Research Institute of CETC,Taiyuan Shanxi 030024,China)
出处
《山西电子技术》
2019年第3期44-46,共3页
Shanxi Electronic Technology
关键词
自动化设备
吸盘印
划伤
automation equipment
sucker seal
scratch
