基于SOI平台的双狭缝波导生物传感器

Double slot waveguide biosensor based on SOI

生物传感器在近几年发展迅速,在医疗应用以及环境检测等发挥了重要的作用,尤其是基于SOI(silicon-on-insulator)平台的光波导的生物传感器,由于其成本低,尺寸小等优点,成为近几年的研究热点。故在单狭缝波导的基础上,提出了一种新型双狭缝波导生物传感器,通过研究生物传感器的原理,并且利用有限单元法算法,优化了该结构的参数。优化后的传感器相比于单狭缝生物传感器,限制因子提高到52.96%,灵敏度为1.10/RIU。

Biosensors have developed rapidly in recent years and have played an important role in medical applications and environmental testing, especially for optical waveguides based on SOI (silicon-on-insulator) platforms, due to their low cost and small size. Such advantages have become a research hotspot in recent years. Based on the single-slot waveguide, a novel double-slot waveguide biosensor is proposed. By studying the principle of biosensor and using FEM (finite element method) algorithm, the parameters of the structure are optimized. The optimized sensor has a normalized energy increase of 52. 96% and a sensitivity of 1. 10/RIU compared to a single-slot biosensor.