LTCC基板砂轮划片质量影响因素研究

Research on the Factors Influencing the Quality of LTCC Substrates Grinding Wheel Dicing

采用单因素分析法,对影响LTCC基板砂轮划片质量的众多因素中的设备耗材因素和划片工艺参数进行了分析。详细说明了设备耗材因素中砂轮树脂刀片、固定方式、磨刀板对划片质量的影响以及划片工艺参数中主轴转速、给进速度、划切深度、冷却液及流量对划片质量的影响,为选取最佳的设备耗材和最平衡的工艺参数提供参考。

In this paper, the single factor analysis method was used to analyze the equipment consumable factors and dicing technics parameters influencing the quality of LTCC substrates grinding wheel dicing. It explained in detail the influence of grinding wheel resin blade, fixing way and sharpening plate on dicing quality, and the impact of dicing technics parameters like spindle speed, feed speed, cutting depth, coolant and flow rate on the quality of dicing. It provides a reference for selecting the best equipment consumables and the most balanced process parameters.