摘要
采用活化Mo-Mn法对α-Al2O3单晶进行了金属化,Mo-Mn层表面容易出现玻璃相,影响Mo-Mn层电镀及焊接效果。通过对α-Al2O3单晶金属化后Mo-Mn层玻璃相的成分分析,找出Mo-Mn层与α-Al2O3单晶的粘接机理,从玻璃相中析出刚玉是关键。
Activated Mo-Mn method is used to metallizeα-Al2O3 single crystal.In metallization glass phase is easily appeared on the surface of Mo-Mn layer,which affects the electroplating and welding of Mo-Mn layer.By analyzing the composition of glass phase of Mo-Mn layer after metallization ofα-Al2O3 single crystal,the bonding mechanism between Mo-Mn layer andα-Al2O3 single crystal is found and it shows that the corundum precipitation from glass phase is the key.
作者
冯佳伦
周兰芬
黄亦工
FENG Jia-lun;ZHOU Lan-fen;HUANG Yi-gong(Beijing Vacuum Electronics Research Institute,Beijing 100015,China)
出处
《真空电子技术》
2019年第3期67-72,共6页
Vacuum Electronics