精确拟合两种薄膜的光学常数及其应用

A new method and application for achieving two layers parameters

研究了一种新的研究薄膜光学参数的方法,在同一基片上沉积两种薄膜,可以同时对这两种薄膜材料进行参数拟合。通过材料实验与光谱测试,基于柯西公式拟合得到了两种薄膜在可见与近红外波段的光学参数。将获得的薄膜参数应用到透450~600、反650~800滤光膜的设计与制备中,结果表明,用该方法获取的薄膜材料参数具有较高的准确性。

A new method for study layer optical parameters has been put forward in the paper.Two layers were deposited on the same substrate,and the optical parameters were fitted at the same time.Through material experiments and spectrum measurement,the layers optical parameters have been fitted with Cauchy expression in visible and near-infrared.The obtained film parameters were applied to the design and preparation of filter films.The results show that the film material parameters obtained by this method are of high accuracy.