具有偏振分束功能的894nm垂直腔面发射激光器

894 nm Vertical Cavity Surface Emitting Laser with Polarization Splitting Function

垂直腔面发射激光器是先进光学信息系统的关键器件之一,具有低成本、低发散角、窄线宽等优点。为满足垂直腔面发射激光器在微型原子钟、军事通信等领域的应用,优化激光器的结构参数来改善腔模位置以及在顶层集成光栅改善出光信号的光场分布就变得尤为重要。基于增益腔模失谐技术以及光栅优异的光束会聚、偏振分束功能,提出一种基于非周期性亚波长光栅的894 nm垂直腔面发射激光器。利用光栅的偏振分束功能,可使器件输出端口的消光大于30 dB。通过改善腔模位置以及氧化孔径,器件在20~90℃范围内基本工作性能保持稳定,在85℃环境下工作波长满足微型原子钟的要求,输出光功率为2 mW,为下一代微型原子钟、军事通信等的发展提供了良好的理论基础。

In order to satisfy the application of vertical cavity surface emitting laser in micro atomic clock and military communication,it is very important to optimize the structure parameters of the laser to improve the cavity mode position and to improve the optical field distribution of the optical signa l in the top layer integrated grating.Based on the gain cavity detuning technique and the excellent beam conv ergence and polarization beam splitting function of grating,a 894nm vertical cavity surface-emitting la ser is proposed based on non-periodic subwavelength grating.Using the polariza tion beam splitting function of grating,we can make the extinction ratio of the output port of the device greater than 30dB.By impr oving the cavity mode position and the oxidation aperture,the basic performance of the device is kept stable in the range of 20℃ to 90℃,and the working wavelength of the micro atomic clock is satisfied at 85℃.The output power is about 2mW.It provides a good theoretical basis for the development of the next generation miniature atomic clock and military communication.