GC-MS测定高纯氪、氙中的痕量氟化物

Determination of fluorides in sulfur hexafluoride by GC/MS

建立了气相色谱质谱联用法测定高纯氪及高纯氙中的四氟化碳、六氟乙烷和八氟丙烷的方法。采用选择性离子监测(SIM)模式,以m/z 69 作为四氟化碳、六氟乙烷和八氟丙烷的定量离子,在0.1~50 μmol/mol 的浓度线性范围内,待测物体积分数与响应值呈良好的线性关系(R2 ≥ 0.999),四氟化碳、六氟乙烷和八氟丙烷的检出限均低于0.01 μmol/mol。方法处理简单,检测时间短,具有良好的准确度和精密度。

A method for the determination of tetrafluoromethane (CF4), hexafluoroethane(C2F6) and octafluoropropane(C3F8) in krypton (Kr) and xenon (Xe) was proposed by gas chromatography-mass spectrometry (GC/MS) with selection ion monitoring mode (SIM). The ions m/z=69 was chosen as quantitative ion for CF4, C2F6 and C3F8. The results show that the calibration curve has good linearity in liner range of 0.1- 50 μmol/mol with the correlation coefficient higher than 0. 999, and the limits of detection are less than 0.01 μmol/mol.The method is simple, rapid and accurate.