电射流掩膜加工内壁微结构的仿真与实验研究

The simulation and experimental study of the mask Jet-ECM machining inner wall micro-structure

针对内壁微结构加工技术中机械振动加工、激光加工等均为逐点加工,加工效率低,以及由机械或高热主导的材料去除过程存在“翻边”和重铸层现象,导致加工质量差等问题,创新性地提出基于球状阴极喷嘴的电射流掩膜电解加工方法加工内壁微结构。通过设计阴极喷嘴的结构使其形成具有一定跨度的扇状射流并利用数控运动平台实现阴极喷嘴的左右摆动扫描待加工曲面,提高了加工效率及精度;采用活动柔性掩模板代替传统的光刻胶掩膜,解决了传统掩膜制备工艺难以适应曲面结构的问题。利用comsol多物理场仿真软件对阴极喷嘴的流场进行优化分析,并进行一系列的验证实验。经实验表明,该方法能实现高效、高精度电解加工内壁微结构,达到了设计要求,验证了其可行性。

In view of the low efficiency of point-by-point processing in mechanical vibration processing and laser processing, and the phenomenon of "flanging" and recasting layer in the material removal process dominated by machinery or high heat, which leads to poor processing quality, an innovative method that the mask Jet-ECM based on the spherical cathode nozzle was put forward to process the inner wall micro-structure. In the study, the structure of the cathode nozzle was designed to form an fan-shaped jet with a certain span, and the NC moving platform realized the left and right swinging of the cathode nozzle to scan the surface to be processed, which were used to improve the processing efficiency and accuracy. The experiment used a movable flexible mask to replace the traditional photoresist mask, which solved the problem that traditional mask preparation technology was difficult to a-dapt to the structure of the curved surface. Besides, comsol multiphysics software was used to optimize the flow field of the cathode nozzle and conduct a series of verification experiments. The experiment showed that this method can realize high-efficiency and high-precision in machining the inner wall micro-structure, meet the design requirements and verify its feasibility.