不同激光损伤程度下K9玻璃形貌的Sinc函数表征

Morphologies of Laser-Induced Damage in K9 Optical Element Using Sinc Function

为满足对高能激光系统中损伤光学元件修复及对后端光学系统进行分析的应用需求,针对高斯激光造成不同损伤程度的K9光学元件建立了损伤表面轮廓的数学表征方法。首先,开展了激光辐照效应实验,获取了不同损伤程度的K9光学元件样品,并通过Zygo白光干涉仪获取样品表面3维形貌原始数据;其次,利用高斯滤波算法对表面轮廓进行提取,并构建合适的坐标系;最后,利用Sinc函数构建了一组正交轮廓曲线。结果表明,3种不同损伤程度K9玻璃的1维轮廓均可用类Sinc函数描述,表征结果与实际滤波后轮廓曲线之间的拟合偏差为0.5~7μm。

To meet the needs of repairing the damaged optical elements and analyzing the rear end optical system, a mathematical characterization method for different damaged K9 optical elements caused by Gaussian laser is established. First, different damaged K9 samples are obtained by laser irradiation experiments, and the original three-dimensional data of the damaged samples are measured by a Zygo white light interferometer. Then, the surface profiles of the samples are extracted by Gaussian filtering algorithm, and a suitable coordinate system is constructed. Finally, a set of orthogonal contour curves are constructed by using Sinc function. The results show that the profiles of three damaged K9 optical elements can be described with analogous Sinc functions. The deviation between the characterization results and the actual filtered samples surface profile curves is 0.5-7 μm.