级联型高压重复频率微秒脉冲源的研制

Development of cascade high voltage repetitive frequency microsecond pulse power supply

针对等离子体的应用,基于级联型电压叠加技术研制了一种最高输出电压为20kV的高压微秒脉冲源,该电源由40个相同的电源模块组成,其单个模块电压等级为500V,降低了对器件的绝缘耐压要求。电源的输出电压值在0~20kV之间可调;重复频率在0~10kHz之间、脉宽在0~30μs之间可调;该电源的上升沿和下降沿均在1μs以内。模块化的设计提高了电源的冗余容错能力。将该电源作为产生等离子体的激励源时,其输出的高压脉冲波形稳定,且根据负载对输出高压波形的要求不同,该电源可以方便地进行调节。

In this paper, a cascade high voltage microsecond pulse power supply with output voltage of 20 kV is developed. The voltage level of a single module is 500 V, which reduces the insulation withstand high voltage requirements of the device. The output voltage value range of this pulse power supply is 0-20 kV;the repetition frequency is adjustable between 0-10 kHz;the pulse width is adjustable between 0-30 μs;the output current value is between 0-15 A;the rising and falling edge of the power supply are all within 1μs. Modular design improves the redundancy fault tolerance of this power supply and reduces its failure rate. When this power source is used as an excitation source for plasma production, and the output high voltage pulse waveform is stable, the power supply can be conveniently adjusted according to different load. When the voltage and frequency change, the mode of the discharge is different.