有效实施混合集成电路工序检验

Effective Implementation of Hybrid Integrated Circuit Procedure Inspection

为避免混合集成电路在生产过程中工序检验的漏检,造成不合格品的无法及时剔除、成本的浪费、效率和可靠性降低,本文从混合集成电路工序检验的内容及作用出发,结合军工企业在混合集成电路工序检验方面的现状和面临的问题,提出了解决办法.①提高镜检人员检验能力;②借助先进成像技术降低镜检难度;③使用自动光学检测设备提升镜检效率并降低漏检率.通过3种方法,有效反馈不合格品数据到各工序,各工序进行有针对性的改进.最终,从生产线在线不合格品数据统计和生产数据统计可以看出,不仅提升了镜检效率,同时通过不合格品数据的及时、有效反馈,生产线各类典型缺陷得到明显下降.

In order to avoid the omission of process inspection in the production process of hybrid integrated circuits, which results in unqualified products can not be eliminated in time, waste of cost, efficiency and reliability reduction, this paper, starting from the content and function of process inspection of hybrid integrated circuits, combines the current situation and problems faced by military enterprises in the process inspection of hybrid integrated circuits and puts forward solutions. One is to improve the inspection ability of mirror inspectors;the other is to reduce the difficulty of mirror inspection with the help of advanced imaging technology;the third is to use automatic optical inspection equipment to improve the efficiency of mirror inspection and reduce the rate of missed detection. Through the above methods, we can effectively feedback the unqualified product data to each process, and make targeted improvements in each process. Finally, according to the statistics of on-line unqualified product data and production data, it can be seen that not only the efficiency of mirror inspection has been improved, but also the typical defects of the production line have been significantly reduced through timely and effective feedback of unqualified product data.