非单向流洁净室颗粒物浓度影响因素的正交模拟研究

Orthogonal Numerical Simulation on Influencing Factors of Particle Concentration in Non-Directional Flow Cleanroom

以某非单向流洁净室的尺寸、布置、使用情况建立模型以研究末端形式、回风口位置、换气次数三个因素对室内颗粒物浓度的影响。采用CFD(计算流体动力学)方法模拟计算了L9 (34)正交实验表对应9个工况下的流场及浓度场。选取四个参考区域的颗粒物浓度作为评价指标以进行极差分析和方差分析。结果表明:不同参考区域的因素影响大小排序不同。总体而言,末端形式是各局部颗粒物浓度的显著性因素,换气次数是室内平均浓度显著性因素。

A numerical model is built according to the size, layout and usage condition of a non-directional flow cleanroom to study the influence of terminal forms, position of outlet and air change rate on indoor particle concentration. The fluid and particle concentration field under 9 conditions of a L9 (34) orthogonal experiment table is calculated by CFD(computational fluid dynamics) method. Particle concentration in four reference areas is selected as evaluation index to conduct range and variance analysis. It turned out that the force grades various in different reference areas. In general, terminal form is significant factor of local concentration while air change rate is that of average indoor concentration.