硬脆材料的磨粒加工仿真技术

Abrasive machining simulation technology for hard-brittle materials

单晶硅等硬脆材料具有高硬度、低断裂韧性等特性,属于难加工材料,其加工表面易产生微裂纹、亚表面损伤层等缺陷。影响硬脆材料磨粒加工过程的因素复杂,一般用仿真技术来研究磨粒加工硬脆材料的去除机理等。本文概述了硬脆材料磨粒加工相关研究中广泛应用的网格法、无网格法以及网格与无网格结合方法,对比分析各仿真方法的特点及存在的局限性并提出未来的研究方向。

Hard-brittle materials such as monocrystalline silicon have high hardness,low fracture toughness and other characteristics,which belong to difficult-to-machine materials.Their machined surfaces are prone to produce micro-cracks,sub-surface damage layers and other defects.The factors affecting abrasive processing of hard-brittle materials are complex.Generally,simulation technology is used to study the removal mechanism of hard-brittle materials in abrasive processing.This paper summarizes the mesh methods,meshfree methods and the combination of mesh and meshfree methods widely used in the research of abrasive machining of hard-brittle materials.The characteristics and limitations of each simulation method are compared and analyzed,and the future research directions are put forward.