摘要
设计了一种应用于岩土工程中电阻式压力传感器。借助于微机械工艺(MEMS)在高弹性体聚二甲基硅氧烷(PDMS)内部嵌入微流孔,并填充新型液态金属(eGaIn)作为传感器的核心区域。结果表明:相对于传统压力传感器,采用软光刻技术微流孔尺寸可以达到μm级,精度更高;采用无毒,导电性好的新型材料液态金属,其适用性更广。
Aresistance type pressure sensor applied in geotechnical engineering was presented.By means of Micro Electro Mechanical System (MEMS),microfluidic holes are embedded in the PDMS,and the new liquid metal (eGaIn)is filled as the core area of the sensor.The results show that compared with the traditional pressure sensor,the microfluidichole dimension can reach the μm level using soft lithography technology with higher accuracy.The sensor has wider applicability by adopting the novel liquid metal (eGaIn),which is non toxic and good conductive.
作者
杜志
贺建波
DU Zhi;HE Jian-bo(ABA Teachers University,Wenchuan 623002,China;Chongqing Geological Environment Monitoring Station,Chongqing 401120,China)
出处
《仪表技术与传感器》
CSCD
北大核心
2019年第6期19-22,共4页
Instrument Technique and Sensor
