两段PTSA法制备电子级液体CO2技术及工业化应用

Two-stage PTSA process for producing electronic grade liquid CO2 and its industrial application

介绍了四川天一科技股份有限公司自主研发的两段PTSA法制备电子级液体CO2技术,该技术以富CO2的气体作为原料,提纯得到电子级液体CO2,产品符合半导体行业的质量要求。该技术已在工业化装置上成功运行,工程应用的结果表明其具有产品质量可靠、能耗低、投资少、运行费用低的优点。

The two-stage PTSA (pressure and temperature swing adsorption) technology independently developed by Sichuan Tianyi Science and Technology Co.,Ltd.,for producing electronic grade liquid CO2 was introduced.This technology uses CO2-rich gas as raw gas to purify and obtain electronic grade liquid CO2,which meets the quality requirements of the semiconductor industry.This technology has been successfully operated on industrial plants,and an application example is introduced.The results show that it has the advantages of reliable product quality,low energy consumption,low investment and low operating cost.