TiO2修饰层与ZnO复合薄膜中非晶化现象研究

A Study on Amorphous Phenomena of ZnO Films with TiO2 Modified Layer

为改善ZnO薄膜的光学性质,采用溶胶-凝胶法分别制备了3层和6层ZnO基底上覆不同层数TiO2修饰层的透明薄膜,分析TiO2修饰层对薄膜晶体结构的影响。用不同工艺流程制备了覆TiO2修饰层的ZnO基透明薄膜,研究非晶化出现的过程。结果表明:所有混合镀膜样品,其结晶性均受到阻碍,所得样品呈现出明显的非晶状态;非晶化的出现会对薄膜的光学性质产生显著影响。非晶化过程发生在样品制备过程中的预处理和退火阶段,其中退火过程中的非晶化更为主要。

The ZnO thin films with different TiO2 modified layers on 3 and 6 ZnO substrates were prepared by sol-gel method. The effect of TiO2 modification layer on the crystal structure of the films was analyzed. And the ZnO films with TiO2 modified layers were prepared by different processes,the stage of amorphous formation was studied. The results shows that the process of crystallization of all the samples was hindered. The samples showed obvious amorphous morphology. Amorphous Phenomena occurs in the pretreatment and annealing processes,and the main effect occurred in the process of annealing.