氦中三氟化氮气体标准物质的研制

Preparation of Certified Reference Material for Nitrogen Trifluoride in Helium

以高纯三氟化氮为原料气,分别使用红外光谱法及质谱法对其进行定性分析,再利用气相色谱仪及露点仪对其中的杂质进行定量检测,通过质量平衡法测定了原料气的纯度。通过重量法制备氦中三氟化氮气体标准物质,并通过均匀性实验、稳定性实验、重量法定值和不确定度评定对氦中三氟化氮气体标准物质进行了研究。结果表明,其均匀性和稳定性满足F检验和t检验要求,符合标准物质的技术规范,所制备的氦中三氟化氮标准物质具有良好的均匀性和足够的稳定性,相对扩展不确定度为2. 0%(k=2)。该系列气体标准物质可望用于相关仪器的检定校准及半导体生产等相关行业的气体报警器的标定和检测。

Using the high purity nitrogen trifluoride as raw gas and qualitative analysis was carried out by IR and MS.The impurities were quantitatively detected by gas chromatograph and dew point instrument. The purity of raw gas was determined by mass balance method.The standard materials of nitrogen trifluoride gas in helium were prepared by gravimetric method. The standard materials of nitrogen trifluoride gas in helium were investigated by homogeneity test,stability test,gravimetric determination and uncertainty evaluation.The results showed that the uniformity and stability met the requirements of F-test and t-test,and met the technical specifications of the standard materials.The prepared reference materials of nitrogen trifluoride in helium had good uniformity and sufficient stability.The relative expansion uncertainty was 2. 0%( k = 2).The standard material of nitrogen trifluoride in helium was analyzed and verified by the qualification unit,which ensured the accuracy and reliability of the quantity of gas reference material.At present,the gas standard material has been applied for a national second class standard material,and has been tried by many enterprises and institutions.It is expected to be used in the verification and calibration of related instruments.Furthermore,it can be used for calibration and detection of gas alarm in semiconductor production and other related industries.