基于平面反射式光栅的微型紫外-可见光谱仪设计

Design of Micro Ultraviolet-Visible Spectrometer Based on Plane Reflection Grating

光谱仪具有快速、无损、多元数据分析等显著特点,已成为环境监测、食品安全检测、生物医学、航空航天和国家安全等众多涉及国民经济和安全领域的必备检测装备。但传统的光谱仪体积大、功耗高、成本高,已严重制约现代光谱分析技术的快速发展。微型化成为重要发展方向。针对上述诸多领域对微小型光谱仪的广泛需求,提出一种基于平面反射式衍射光栅的宽光谱、高分辨率微型紫外-可见光谱仪光学系统设计方法。考虑微型光谱仪宽光谱范围与高分辨率的矛盾,提出基于光线追踪的设计并结合系统像差消除方法。通过ZEMAX软件完成光学系统的优化设计,实现了微型紫外-可见光谱仪的宽光谱、高分辨率设计。设计的仪器光谱范围为200~800nm,在50μm入射狭缝下整个波段的光谱分辨率优于0.5nm。该方法可广泛应用于基于平面反射式衍射光栅的宽光谱、高分辨率微型光谱仪光学系统设计。

The spectrometer is characterized by rapid,nondestructive,multivariate data analysis,and has become a necessary testing equipment in many fields,such as environmental monitoring,food safety testing,biomedicine,aerospace and national security.However,the traditional spectrometer is large size,high in power consumption and cost,which has seriously restricted the rapid development of modern spectral analysis technology.Therefore,the miniaturization of spectrometer has become an important development direction.In view of the wide demand for micro-mini spectrometer in many fields mentioned above,an optical system design method based on plane reflection diffraction grating for wide-spectrum,high-resolution micro UV-visible spectrometer is proposed.Considering the contradiction between the wide spectral range and high resolution of the micro spectrometer,a design method based on ray tracing and combining with the system aberration elimination is put forward,and the optimal design of the optical system is completed by ZEMAX software,thus the wide spectrum and high resolution design of the micro UV-visible spectrometer is realized.The instrument is designed for a spectral range of 200~800 nm,and the spectral resolution of the entire band is better than 0.5 nm in a 50 μm incident slit.This method can be widely used in the design of optical system of micro-spectrometer with wide spectrum and high resolution based on plane reflection diffraction grating.