气化粉与湿法粉制备ITO靶材过程及性能对比研究

Comparison Study on Preparation Process and Performance of ITO Target by Gasified Powders and Co-precipitated Powders

分别以ITO气化粉和湿法粉为原料,在相同工艺条件下,经过球磨、造粒、成型等工序制备了ITO靶材,研究了ITO气化粉和湿法粉制靶中间品及最终靶材的主要性能。结果表明:模压和CIP后,湿法粉坯体密度均低于气化粉的,但由于ITO湿法粉原料粒径细而均匀,烧结活性更高,故在较低的烧结条件下可制备出更高密度的靶材。

Under the same technological conditions, ITO targets were prepared with gasified ITO powders and co-precipitated ITO powders by such processes as ball-milling, prilling and molding. The main performances of intermediate products and targets prepared by gasified and co-precipitated powders were studied. The result shows that after mould pressing and CIP, the density of ITO green body prepared from co-precipitated powders is lower than that of ITO green body from gasified powders. The grain size and sintering activity of the co-precipitated power are smaller and higher, so the targets of high density could be obtained under less demanding conditions.