X波段CMOS高精度低损耗6位数控移相器的研制

Design of X-Band 6 Bit High Precision Low Loss Digital Controlled Phase Shifter in CMOS

该文基于0.13μm CMOS工艺设计了一款X波段高精度低损耗6位无源数控移相器,该移相器相位在360°范围内可调,最小有效位5.625°。通过使用三阱MOSFET晶体管作为开关电路,并采用高阻浮体技术,在8-12GHz范围内,移相器插损小于13.5d B,寄生调幅均方根误差小于0.26d B,相位均方根误差≤5°,输入输出回波损耗小于等于-14d B,芯片面积约为1.8^*0.9mm^2。

A 6 Bit high precision low insertion loss passive digital controlled phase shifter was designed in 0.13 um CMOS process.The phase coverage of 360° With the least significant bit 5.625° is achieved at 8-12 GHz.The fabricated phase shifter with triple-well NMOS transistor using floating sub technique demonstrates an insertion loss less than 13.5 dB,The average rms amplitude and phase error of less than 0.26 dB and 5°and the input/output return loss better than 14 d B over the entire operation bandwidth.The phase shifter has a compact chip area of 1.8^*0.9 mm^2.