摘要
非球面的精密检测中,需要使用到高质量的相位补偿器件,补偿元件的质量对检测结果的精度有直接影响。本文针对一抛物面透镜,设计了一个计算全息板。重点分析了计算全息板在制造过程中存在的各种误差的影响,分别从整体条纹移动、单个条纹定位偏差、占空比改变三个方面分析了在误差影响下,对误差引起的光场畸变进行了计算。结果表明,计算全息板的边缘处的加工误差带来的影响大于中心部分,要让通过计算全息板后光场分布的误差均方根值控制在10^-4这个量级,条纹加工误差不超过1 μm。
In the precision detection of aspheric surfaces,high-quality phase compensation devices are required,and the quality of the compensation components has a direct influence on the accuracy of the detection results. In this paper,a computational holographic plate is designed for a parabolic lens. The influences of various errors in the manufacturing process of the holographic plate are analyzed,and the optical field distortion caused by the error under the influence of the error is analyzed from three aspects: the overall stripe movement,the single stripe positioning deviation and the duty ratio change. The calculation results show that the processing error at the edge of the holographic plate is greater than that of the central part. The root mean square value of the optical field distribution after the calculation of the holographic plate is controlled to 10^-4,and the stripe processing error is within 1 μm.
作者
汪艳
张蓉竹
WANG Yan;ZHANG Rongzhu(School of Electronics Information Engineeing, Sichuan University, Chengdu 610064, China)
出处
《激光杂志》
北大核心
2019年第7期15-18,共4页
Laser Journal
基金
国家高技术研究发展计划资助项目(No.2015AA8042038)
关键词
非球面
计算全息
光场分析
加工误差
aspheric surface
CGH
light field analysis
processing error
