ZSN法高纯硅烷气产业化进程与应用前景

Industrialization process and application prospect of high-purity silicon hydride produced by ZSN method

高纯度硅烷气是电子化工材料、光电子、微电子产业的重要支撑材料之一.2014年9月,中国平煤神马集团与上海交通大学等单位合作,研发出拥有完全自主知识产权的成套工业化硅烷气生产技术,结束了国外技术垄断和国内产品全部依靠进口的历史.介绍了ZSN法高纯硅烷生产工艺流程和优势,分析了战略合作、技术研发、规模化生产及全面占领市场背后的多重助推力量.预判了硅烷这一高端新兴产业的前景.

High-purity silicon hydride is one of the important supporting materials for electronic chemical materials, photoelectron and micro-electronics. Cooperating with Shanghai Jiao Tong University and other departments, China Pingmei Shenma Group developed a whole-set silicon hydride industrial production technology with completely independent intellectual property rights, ending a history of overseas technical monopoly and domestic products totally depending on imports. The technical process and advantages of high-purity silicon hydride produced by ZSN method were introduced and the multiple supporting and boosting factors behind strategic cooperation, technology research and development, large-scale production and overall market share were analyzed. And the application prospect of silicon hydride, a high-end emerging industry, was predicted.