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NaxMg0.2Zn0.8-xO纳米薄膜的光学性能

Optical Properties of NaxMg0.2Zn0.8-xO Nano Thin Films
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摘要 采用溶胶-凝胶法在玻璃衬底上以二水乙酸锌(C4H6O4Zn·2H2O)、乙酸镁(C4H14-MgO8)、氯化钠(NaCl)为前驱体制备NaxMg0.2Zn0.8-xO纳米薄膜,借助扫描电子显微镜(SEM)、X射线衍射仪(XRD)、喇曼光谱及光致发光谱(PL)等手段,对NaxMg0.2Zn0.8-xO薄膜的晶格结构、表面形貌及光学性能进行表征及分析,研究了Na+不同掺杂浓度对NaxMg0.2-Zn0.8-xO薄膜的结构及光学性能的影响。研究结果表明,所有样品均为六方纤锌矿结构;Na+的掺入弥补了MgZnO薄膜本身存在的晶格缺陷,颗粒分布均匀且紧密,晶粒尺寸增大;当x在0~0.04内,x为0.02时,Na0.02Mg0.2Zn0.78O薄膜的结晶性能更加优秀,且缺陷减少,光致发光性能达到最佳。 NaxMg0.2Zn0.8-xO nano thin films were prepared on the glass substrate by the sol-gel method with zinc acetate dihydrate(C4H6O4Zn·2H2O),magnesium acetate(C4H14MgO8)and sodium chloride(NaCl)as precursors.The crystal structure,surface morphology and optical properties of the NaxMg0.2Zn0.8-xO nano thin films were characterized and analyzed by the scanning electron microscope(SEM),X-ray diffractometer(XRD),Raman spectra and photoluminescence(PL)spectra.The effects of Na+with different doping concentrations on the structure and optical properties of the NaxMg0.2Zn0.8-xO thin films were studied.The research results show that all samples are hexagonal wurtzite structure;the addition of Na+makes up for the intrinsic lattice defects of MgZnO thin films.The distribution of particles is uniform and compact,and the grain size increases;when xis in the range of 0-0.04 and xis 0.02,the crystallization performance of the Na0.02Mg0.2Zn0.78O thin films is better,the defects reduce,and the photoluminescence performance is the best.
作者 张舒婷 端木庆铎 王浚宇 Zhang Shuting;Duanmu Qingduo;Wang Junyu(School of Science , Changchun University of Science and Technology, Changchun 130022, China)
出处 《微纳电子技术》 北大核心 2019年第8期612-616,共5页 Micronanoelectronic Technology
基金 国家自然科学基金资助项目(61107027,61077024)
关键词 NaxMg0.2Zn0.8-xO 纳米薄膜 光学性能 溶胶-凝胶法 微观结构 NaxMg0.2Zn0.8-xO nano thin film optical property sol-gel method micro structure
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