一种多腔内渗式湿度发生器的研制

Design of one kind of multi-case permeation tubes humidity generator

介绍了由质量流量控制器、电磁阀组成的三路配气系统组成的多腔内渗式湿度发生器的设计方案,及渗透管材料选型、标定等制作过程,研制出一种多腔内渗式湿度发生器。通过实验验证,对研制的湿度发生器进行了测量不确定度、重复性、稳定性的评价,研制的湿度发生器露点测量不确定度U=0.7℃,重复性为0.2℃。技术指标满足湿度检定校准工作的要求。校准湿度仪器时,根据发生湿度值的需要,由电磁阀控制导通相应气路,每个渗透管完全独立工作,在不同流量条件下,分别对应不同的湿度发生值,较大地扩展了湿度发生值的范围,减少了计量校准所需时间,提高了工作效率和可靠性。

The design scheme of three-way gas distribution system consisting of mass flow controller and solenoid valve was described, the production process of material selection and calibration of permeate tube was introduced, and a multi-cavity infiltration humidity generator was developed. Through the experimental verification,the uncertainty of the measurement, the repeatability and the stability of the developed humidity generator were evaluated. The uncertainty of the dew point measurement of the developed humidity generator was 0.7 ℃ and the repeatability was 0.2 ℃. Technical indicators met the requirements of humidity calibration and calibration work. When the humidity instrument was calibrated, the conduction of the corresponding gas path was controlled according to the need of the humidity value. Each permeate tube worked completely independently. Under different flow conditions, it corresponded to different humidity occurrence values with greatly expands, and it would reduce the time required for metering and calibration, increase work efficiency and reliability.