关于新型功能材料精密微驱动器的研究综述

Research on Precision Microactuators for New Functional Materials

精密微驱动器是微机电系统的核心部件,是实现微器件运动的关键。微驱动器的工作原理主要是利用物体的物性效应(物理效应、化学效应、生物效应等)实现对目的物的驱动与操作,本质就是将光、电、热等多种形式的能量转换成为机械能输出,是近几年研究的热点。文章全面综述了电热式、磁致伸缩、电磁、压电陶瓷、静电和形状记忆合金几种微位移驱动器的原理、结构、特性及应用领域。

Precision microactuator is the core component of MEMS,and it is the key to realize the movement of micro devices.The principle of micro actuator is to make use the physical properties of effect(physical effect,chemical effect,biological effect and so on)to drive and operate the object.The essence is to convert the energy of light,electricity and heat into mechanical energy output,which is the hot spot in recent years.The principles,structures,characteristics and application fields of several micro displacement drivers for electrothermal,magnetostrictive,electromagnetic,piezoelectric,electrostatic and shape memory alloys were reviewed in this paper.