不同膜厚对SiO2光子晶体形貌及光学性能的影响

Influence of Film Thickness on the Morphology and Optical Properties of SiO2 Photonic Crystals

利用改良的Stber法制成了粒径均一的SiO2胶体颗粒,胶体微球颗粒平均粒径为200nm。保持SiO2悬浮液体积分数相同,对双基片自组装垂直沉积进行改造,改变夹层厚度,沉积得到厚度不同的SiO2光子晶体薄膜。利用扫描电子显微镜观察了膜厚不同的SiO2光子晶体薄膜样品的表面以及断面微观形貌,测试了样品的光反射性能,此外还讨论了光子晶体薄膜厚度对样品表面的形貌以及样品光反射性能带来的影响。

The uniform SiO2 particles with a diameter of 200 nm were synthesized by modified St ber method.In the same concentration of SiO2 suspension,SiO2 photonic crystals with different thickness were successfully fabricated by modifying two-substrate vertical deposition method.The surface and cross-section morphologies of SiO2 photonic crystals with different thickness were characterized by SEM.Reflection spectrum of the samples were measured by UV-Vis spectrophotometer.Influence of film thickness on the morphology and optical properties of SiO2 photonic crystals were analyzed.