电解-萃取组合工艺处理废磷酸蚀刻液

Electrolysis-extraction Combined Process for Treating Waste Phosphoric Acid Etching Solution

采用电解-萃取组合工艺,以薄膜晶体管液晶显示屏生产过程中产生的废磷酸蚀刻液为研究对象,考察电解对废磷酸蚀刻液的脱色和杂质去除效果,并研究以磷酸三丁酯-30%煤油作为萃取剂时,对废磷酸蚀刻液的萃取效果。实验结果表明:在温度40℃,极板间距10mm,电流密度为10mA/cm2的条件下电解15min,废磷酸蚀刻液的透光率达到85%;以磷酸三丁酯-30%煤油作为萃取剂,在温度40℃,相比为4的条件下萃取15min,磷酸的萃取率达到62.2%。

The electrolysis-extraction combined process was used to study the decolorization and impurity removal of the waste phosphoric acid etching solution by the waste phosphoric acid etching solution produced during the production process of the thin film transistor liquid crystal display.And the extraction effect of waste phosphoric acid etching solution with tributyl phosphate-30%kerosene as extraction agent was studied.The experimental results showed that,under the condition of electrolysis for 15 min at 40℃,electrode distance 10 mm,and current density 10 mA/cm2,the light transmittance of waste phosphoric acid etching solution reached 85%.The extraction rate of phosphoric acid reached 62.2%when tributyl phosphate-30%kerosene was used as the extraction agent at 40℃,phase ratio 4 for 15 min.